Ultra Pure Chemicals
Acids
Sulphuric Acid 96%
Sulphuric Acid is mixed with Hydrogen Peroxide to form Caro's Acid (H2SO5) which may then be used to remove photoresist and for the pre-furnace cleaning of non-metal substrates. During these applications Hydrogen Peroxide is added, at either predetermined intervals or after each predetermined number of batches, to ensure that chemical activity is maintained. Alternatively, the product may be mixed with Hydrogen Peroxide in ratios ranging between 4:1 to 50 : 1. As a consequence of mixing the reaction temperature rises to about 120°C which may be maintained by heating the tank. The bath life for large scale production is between 8 and 12 hours. In addition Sulphuric Acid may be mixed with Phosphoric Acid and Nitric Acid for silicon etch applications or it may be mixed with Nitric Acid for cleaning applications.
Market Segments:
Functions:
Etchant, Cleaner, Resist Stripper