Ultra Pure Chemicals
Mixtures/Blends
Etchants for Titanium
Titanium reacts with Fluoride ions to form the soluble (TiF6)2- ion. Nitric Acid acts as an oxidant, controlling the rate of reaction. Selectivity is achieved by using Ammonium Fluoride as the source of F- ions thus limiting attack on underlying layers.
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Etchant
