Mems & Nanotechnology

MEMS technology requires high purity chemicals and operates to the same high standards that can be found with leading-edge semiconductor manufacturers. Our expertise, service levels and wide range of quality products enables OM Group UPC to be a leading chemical supplier to this market.

Products

• Acids
• Acetic Acid Glacial
• Ammonium Fluoride 40%
• Hydrochloric Acid 37%
• Dilute Hydrofluoric 10%, 4.9%, 1%
• Hydrofluoric Acid
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• Bases
• Ammonium Hydroxide Solutions
• Potassium Hydroxide Solutions
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• Mixtures/Blends
• Aluminium Etchants
• Buffered Oxide Etchants (BOE)
• Gold Etchants (Nitric/HCl)
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• Oxidisers
• Hydrogen Peroxide 31%
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• Solvents
• Acetone
• n-Butyl Acetate
• Ethylene Glycol
• Ethyl Lactate
• Hexamethyldisilazane

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• Nitric Acid
• Nitric Acid 97% - 99% (Fuming)
• Phosphoric Acid 86%; 80%
• Sulphuric Acid 96%
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• Tetramethylammonium Hydroxide (up to 25%)
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• Gold Etchants (KI/l based)
• Poly Silicon Etchants
• Silicon Etchants
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• Isopropyl Alcohol
• Methanol
• N- Methyl 2 Pyrrolidone
• Pgmea
• Xylene