• • • Solvents

Ultra Pure Chemicals

Solvents

• Acetone
• n-Butyl Acetate
• Cyclopentanone
• Ethanol
• Ethylene Glycol
• Ethyl Lactate

• Hexamethyldisilazane
• Isopropyl Alcohol
• Methanol
• N- Methyl 2 Pyrrolidone
• Pgmea
• Xylene

Ethyl Lactate

Ethyl Lactate is a general safer solvent. It may be used as an Edge Bead Remover or for the removal of soft-baked resist. The efficiency of Ethyl Lactate may be improved by mixing it with PGMEA or MEK. In addition, Ethyl Lactate may be used to remove organic matter from machine parts.

Market Segments:

• Semiconductor
• Mems & Nanotechnology

Functions:

Photolithography