• • • Solvents

Ultra Pure Chemicals

Solvents

• Acetone
• n-Butyl Acetate
• Cyclopentanone
• Ethanol
• Ethylene Glycol
• Ethyl Lactate

• Hexamethyldisilazane
• Isopropyl Alcohol
• Methanol
• N- Methyl 2 Pyrrolidone
• Pgmea
• Xylene

n-Butyl Acetate

n-Butyl Acetate may be used as an Edge Bead Remover for some positive resists and SOG products. n-Butyl Acetate may also be used as a post-resist rinse for negative resists.

Market Segments:

• Semiconductor
• Mems & Nanotechnology

Functions:

Photolithography