Ultra Pure Chemicals
Mixtures/Blends
Buffered Oxide Etchants (BOE)
Silicon Dioxide reacts with Hydrofluoric Acid to form hexafluorosillicate ions. (SiF6 2--). The Ammonium Fluoride acts both as a buffer, to maintain the concentration of the HF species, and as a source of Ammonium ions to form Ammonium Hexafluorosillicate (NH4)2SiF6. This soluble reaction product is then dissolved into the etching solution. Solutions available with (Lodyne) or without surfactant.
Market Segments:
Functions:
Etchant